TRANSFER OF FABRICATION TECHNOLOGIES OF THIN FILM ACTIVE AND EXTREME ENVIRONMENT PASSIVE DEVICES.
NAVAL AVIONICS FACILITY INDIANAPOLIS IND
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The report describes the transfer of vacuum deposition technologies relative to thin film active devices and high temperature passive devices from Melpar, Incorporated, to the U. S. Naval Avionics Facility, Indianapolis. Detailed descriptions are included of apparatus, materials, test equipment, fabrication procedures, and process parameters. Author
- Electrical and Electronic Equipment
- Fabrication Metallurgy