LOW COST INTEGRATED CIRCUIT TECHNIQUES.
Quarterly progress rept. no. 2, 15 Sep-14 Dec 65,
PHILCO CORP LANSDALE PA
Pagination or Media Count:
Both the evaporated and pyrolytic glass deposition techniques have been improved, resulting in encapsulating deposits of higher quality. The pinhole problem associated with the evaporated glass has been nearly eliminated. Also, improved adherence has been obtained with the pyrolytically deposited glass. Glass delineation was improved by using an improved fixture for evaporation through a metal mask. Some improvement was also made in the delineation of pyrolytically deposited glass. In the work on glass evaluation techniques, a method involving pressurized steam has proven to be effective in the relative evaluation of the passivating properties of glass. Also, mobile charge concentration studies were performed on both evaporated and pyrolytically deposited glass. Problems encountered in metalization include increased ohmic contact resistance and poor delineation. Some test models have been produced, although device and metal delineation problems have delayed the completion of the vehicles. The vehicles have been subjected to preliminary electrical and environmental evaluation. A plan for the testing and specification of the preliminary exploratory development models was prepared. Author
- Electrical and Electronic Equipment
- Ceramics, Refractories and Glass
- Fabrication Metallurgy