THIN-FILM POLYCRYSTALLINE FIELD-EFFECT TRIODE.
Quarterly rept. no. 3, 1 Jan-31 Mar 65,
RCA LABS PRINCETON N J
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A process for fabricating CdSe thin-film-transistors TFTs reproducibly in large arrays has been developed. The deposition of the semiconductor by evaporation upon an unheated substrate is controlled by means of electrical monitoring of a sample TFT deposited on the same blank with the circuit array. Wire grill masks in the vacuum system are used to define the patterns. Integrated thin-film circuits incorporating 540 CdSe TFTs have operated continuously for more than 500 hours without failure. The Hall mobility and resistivity of vacuum -deposited CdSe films have been studied for various deposition conditions. Metal-insulator-semiconductor M-I-S structures have been used to study instability mechanisms in the TFT. A systematic program of fabrication and life-testing of CdS TFTs is being carried out. Analog and digital circuits incorporating TFTs were studied. Masks were designed and ordered for a three-input digital gate. Author
- Electrical and Electronic Equipment