Accession Number:

AD0630408

Title:

ANALYSIS AND DESIGN OF A MACHINE-SCAN ELECTRON BEAM DEVICE.

Descriptive Note:

Technical memo.,

Corporate Author:

PENNSYLVANIA STATE UNIV UNIVERSITY PARK ORDNANCE RESEARCH LAB

Personal Author(s):

Report Date:

1966-03-08

Pagination or Media Count:

85.0

Abstract:

Electron beams can be used to perform a dual role in the fabrication of microcircuits. An electron source may be pulsed to provide a beam capable of machining materials, or alternately, to provide a low current beam for scanning electron image formation. If the beam is pulsed to high and low intensities at a sufficiently fast rate, it is possible to obtain a continuous picture of a bombarded specimen being machined. This paper presents the results of a study concerned with the design of a machine-scan electron beam device to perform the above operation. Theoretical calculations are coupled with experimental observations in order to design a suitable device, and a performance analysis on this apparatus is presented. The recommendations deal specifically with improvements on the device for further research. Author

Subject Categories:

  • Manufacturing and Industrial Engineering and Control of Production Systems
  • Test Facilities, Equipment and Methods
  • Optics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE