THE PERFORMANCE OF SIO SOURCE (NAFI IF-1008) IN SINGLE-CHAMBER VACUUM SYSTEMS.
Interim technical rept. Nov 64-Mar 65,
NAVAL AVIONICS FACILITY INDIANAPOLIS IND
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An evaporation source for deposition of silicon monoxide thin films was reported to possess high raw material capacity and high evaporation rate characteristics. The source design was evaluated in two different laboratory bell jar vacuum systems and was found to be unsatisfactory. Author
- Electrical and Electronic Equipment
- Ceramics, Refractories and Glass
- Manufacturing and Industrial Engineering and Control of Production Systems