Accession Number:

AD0628485

Title:

PINHOLE ARRAY CAMERA FOR INTEGRATED CIRCUITS,

Descriptive Note:

Technical rept.,

Corporate Author:

ARMY ELECTRONICS COMMAND FORT MONMOUTH N J

Personal Author(s):

Report Date:

1966-01-01

Pagination or Media Count:

19.0

Abstract:

A pinhole camera for the production of multiple images for integrated circuits, consisting of an array of precisely positioned uniform diameter pinholes and a vacuum back to hold the film or plate, has been designed, fabricated, and tested. This camera was designed to replace the step-and-repeat camera method of producing multiple images that is presently used. The two basic requirements for repetition of circuit patterns are the achievement of high image quality and precise registration between all the masks in a set. The arrangement discussed here permits lines of .0005 width in the final working mask with precise registration. Author

Subject Categories:

  • Photography

Distribution Statement:

APPROVED FOR PUBLIC RELEASE