Accession Number:

AD0625776

Title:

SPUTTERING.

Descriptive Note:

Annual rept. 1 Nov 64-31 Oct 65,

Corporate Author:

LITTON SYSTEMS INC MINNEAPOLIS MINN APPLIED SCIENCE DIV

Personal Author(s):

• Stuart,R. V.
• Wehner,G. K.

Report Date:

1965-11-01

Pagination or Media Count:

46.0

Abstract:

Measurement of the Doppler shift of light emitted in the direction of travel by sputtered Mo and Ag atoms have verified time-of-flight measurements of ejection energies of sputtered atoms. The Doppler shift measurements, being dependent on the distribution of energies of sputtered atoms, provide much stronger substantiation of time-of-flight data than that provided by agreement with average ejection energy measurements. The Doppler shift measurements have substantiated not only numerical values of ejection energies but also the shape of the distribution function. The dependence of the high energy tail on bombarding ion energy and the lack of dependence of the most probable ejection energy on bombarding ion energy are also verified by the Doppler shift measurements. Author

Descriptors:

• *SPUTTERING
• EJECTION
• ATOMS
• ENERGY
• DOPPLER EFFECT

Subject Categories:

• Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE