PRODUCTION ENGINEERING MEASURE FOR SILICON OVERLAY TRANSISTORS.
Quarterly progress rept. no. 1, 1 Jan-31 Mar 65,
MOTOROLA INC PHOENIX ARIZ SEMICONDUCTOR PRODUCTS DIV
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New base predeposition and base diffusion systems were put into production and evaluated. Work was started on a new emitter and gold diffusion process. Work was started on the emitter stripe width evaluation. Chemical etching was placed into production and work on slurry polishing is almost complete. A new photoresist was evaluated and production controls are presently being applied. New assembly parts and processes were evaluated from the assembly viewpoint. Author