Accession Number:

AD0614757

Title:

THE MULTIPURPOSE INTEGRATED ELECTRONIC PROCESSOR.

Descriptive Note:

Revised ed.,

Corporate Author:

OTTAWA UNIV (ONTARIO)

Report Date:

1964-08-24

Pagination or Media Count:

4.0

Abstract:

At the University of Ottawa, a Multipurpose Integrated Electronic Processor MIEP is being built for basic research in integrated electronics and its related fields. When completed, the MIEP will permit controlled deposition of thin films, electron-beam micromachining, topological inspection and chemical analysis of the films. These processes will be achieved without the need of moving the substrate from one chamber to another, with the associated problems of reregistration and maintaining clean surfaces. The primary aim of the project is the fabrication of thin-film integrated circuits containing micron-sized active and passive elements. Author

Subject Categories:

Distribution Statement:

APPROVED FOR PUBLIC RELEASE