Accession Number:

AD0608946

Title:

SPUTTERING.

Descriptive Note:

Annual rept. for 1 Nov 63-31 Oct 64,

Corporate Author:

GENERAL MILLS INC MINNEAPOLIS MINN

Personal Author(s):

Report Date:

1964-11-24

Pagination or Media Count:

48.0

Abstract:

Energy distributions have been determined for atoms sputtered from polycrystalline targets for twenty-three different target materials. Ejection energies are found to depend strongly on the mass of the target atom. Most probable and average ejection energies plotted as a function of the atomic number of the target material show a periodicity in that within each period these energies tend to decrease with increased filling of the d-shell. Average ejection energies range from 6.8 eV for Be to 45 eV for U. Average ejection velocities group mostly around 600,000 cmsec and range from a high of 1,100,000 cmsec for Be to a low of 390,000 cmsec for Ag. Author

Subject Categories:

Distribution Statement:

APPROVED FOR PUBLIC RELEASE