Accession Number:

AD0608525

Title:

MICROMINIATURE PROGRAMMABLE LOGIC ELEMENTS.

Descriptive Note:

Final rept. for Oct 61-Jun 64,

Corporate Author:

PHILCO CORP LANSDALE PA

Personal Author(s):

Report Date:

1964-08-01

Pagination or Media Count:

44.0

Abstract:

The work described was part of an AFCRL-sponsored research and development program on Microminiature Programmable Logic Elements. The ultimate feasibility of the elements was demonstrated by their incorporation into the digital section of a pattern recognition system designated the Parapropagation Pattern Classifier PPC. The work performed in the first five phases is briefly reviewed. The results of program phases IV and V particularly pointed up difficulties in connection with obtaining isolation in homogeneous silicon wafers. The introduction of the epitaxial isolation technique greatly improved the circuit yield but was not without associated difficulties. Therefore Phase VI, by mutual agreement, was directed at a study of the capabilities and limitations of various techniques for obtaining improved isolation in silicon monolithic microcircuits. The SiO2 isolation process considered as the most promising of the currently available approaches is described in detail, process variations are indicated, and the results of the recommended process are illustrated by a series of photomicrographs. Author

Subject Categories:

Distribution Statement:

APPROVED FOR PUBLIC RELEASE