Accession Number:

AD0607060

Title:

EPITAXIAL CONTROL SYSTEM.

Descriptive Note:

Final rept.,

Corporate Author:

MOTOROLA INC PHOENIX ARIZ

Personal Author(s):

• Jackson,Don M. ,Jr.

Report Date:

1964-05-14

Pagination or Media Count:

12.0

Abstract:

The epitaxial vapor analysis system was delivered, installed, and successfully tested. The system consists of two main sections - the analyzer console which is built about a small, 90 degree sector, highly sensitive mass spectrometer and the gas control console which serves to meter and control all gases to an epitaxial reactor with special provision for the diversion of various gas streams to the analyzer console for monitoring purposes. The analyzer section has provisions for either continuous or batch sampling. The gas control console is a completely automatic, multi-layer epitaxial growth system. The report consists for the most part of operational instructions for the system. Author

Descriptors:

• (*SILICON
• EPITAXIAL GROWTH)
• (*SINGLE CRYSTALS
• EPITAXIAL GROWTH)
• (*EPITAXIAL GROWTH
• CONTROL SYSTEMS)
• VAPORS
• IMPURITIES
• GAS ANALYSIS
• MASS SPECTROSCOPY
• SPECTRUM ANALYZERS
• CONTROL PANELS
• MEASURING INSTRUMENTS
• SAMPLERS
• OPERATION
• CALIBRATION
• INSTRUCTION MANUALS

Subject Categories:

Distribution Statement:

APPROVED FOR PUBLIC RELEASE