MINIATURE THIN FILM INDUCTORS (MODIFICATION NO. 2).
Final development rept. for 27 May 63-27 May 64,
MOTOROLA INC SCOTTSDALE ARIZ
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The report describes a program directed toward the development of techniques for fabricating miniature thin-film inductors. The basic device consists of a flat spiral conducting path deposited on a bulk ferrite substrate and encapsulated with a ferrite film deposit. The goal of the program was to fabricate these inductances in a range from 38 to 1000 microhenries with a Q-value of 100 measured at 1 Mc. The technique for depositing the ferrite film by the spray hydrolysis of a chloride solution is described. The spiral coils were made from gold and deposited by a combination of vacuum evaporation and electrodeposition techniques. The maximum air core coil inductance obtained in an area 0.3 inch square was 1.8 microhenries. The largest inductance value obtained for a single encapsulated coil was 54 microhenries with a Q-value of 6 at 1 Mc. Author