Accession Number:

AD0600149

Title:

THE STRUCTURE AND STRENGTH OF EPITAXIAL FILMS.

Descriptive Note:

Bimonthly progress rept. no. 3, 17 Feb-17 Apr 64.

Corporate Author:

MIDWEST RESEARCH INST KANSAS CITY MO

Personal Author(s):

Report Date:

1964-05-15

Pagination or Media Count:

12.0

Abstract:

Most of the experimental equipment, designed for deposition and evaluation of epitaxial films on single crystal substrates, has been assembled. Discussions and photographs of the evaporation oven, substrate holder, vacuum system, and stress mechanism are presented. Brief reviews are given on the design of a strain measuring system and of plans for future work. Author

Subject Categories:

Distribution Statement:

APPROVED FOR PUBLIC RELEASE