SEMICONDUCTOR SURFACE DAMAGE PRODUCED BY RUBY LASERS.
Rept. for 1 Jul 65-15 Mar 66,
AEROSPACE CORP EL SEGUNDO CA LAB OPERATIONS
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Semiconductor surface damage, produced by a focused beam of ruby laser light, consisted of regular patterns of cracks and a system of parallel straight lines. The system of grooves spacing of about 0.0001 cm can be explained on the basis of diffraction effects at the focus of a lens. The regular crack patterns were related to the cleavage habits of the semiconductors by x-ray analysis. Author
- Electrical and Electronic Equipment
- Lasers and Masers
- Solid State Physics