Accession Number:

AD0485293

Title:

THE BERKELEY SCANNING ELECTRON MICROSCOPE-I.

Descriptive Note:

Research rept.,

Corporate Author:

CALIFORNIA UNIV BERKELEY ELECTRONICS RESEARCH LAB

Personal Author(s):

• Everhart, T. E.
• Pease, R. F. W.
• Pedersen, S. R.

Report Date:

1966-05-27

Pagination or Media Count:

65.0

Abstract:

This report describes the Berkeley Scanning Electron Microscope-I. The principles of operation of a scanning electron microscope and the design criteria for this particular microscope are stated in the introduction. The vacuum system, the electron-optics, the mechanical construction, and the circuits used in this instrument are described in subsequent sections. Author

Descriptors:

• (*ELECTRON MICROSCOPES
• OPERATION)
• SCANNING
• ELECTRON OPTICS
• INTEGRATED CIRCUITS
• RELAXATION OSCILLATORS
• POWER AMPLIFIERS
• VIDEO AMPLIFIERS
• POWER SUPPLIES
• CONTROL PANELS
• VACUUM APPARATUS
• ELECTRON BEAMS
• WIRING DIAGRAMS

Subject Categories:

• Optics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE