Accession Number:

AD0485293

Title:

THE BERKELEY SCANNING ELECTRON MICROSCOPE-I.

Descriptive Note:

Research rept.,

Corporate Author:

CALIFORNIA UNIV BERKELEY ELECTRONICS RESEARCH LAB

Report Date:

1966-05-27

Pagination or Media Count:

65.0

Abstract:

This report describes the Berkeley Scanning Electron Microscope-I. The principles of operation of a scanning electron microscope and the design criteria for this particular microscope are stated in the introduction. The vacuum system, the electron-optics, the mechanical construction, and the circuits used in this instrument are described in subsequent sections. Author

Subject Categories:

  • Optics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE