Accession Number:
AD0485293
Title:
THE BERKELEY SCANNING ELECTRON MICROSCOPE-I.
Descriptive Note:
Research rept.,
Corporate Author:
CALIFORNIA UNIV BERKELEY ELECTRONICS RESEARCH LAB
Personal Author(s):
Report Date:
1966-05-27
Pagination or Media Count:
65.0
Abstract:
This report describes the Berkeley Scanning Electron Microscope-I. The principles of operation of a scanning electron microscope and the design criteria for this particular microscope are stated in the introduction. The vacuum system, the electron-optics, the mechanical construction, and the circuits used in this instrument are described in subsequent sections. Author
Descriptors:
Subject Categories:
- Optics