HIGH-INFORMATION-DENSITY STORAGE SURFACES.
Quarterly rept. no. 3, 1 Oct-31 Dec 65,
STANFORD RESEARCH INST MENLO PARK CALIF
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This report gives the results of experimental work in preparation for the formation of high-density information-storage mosaics consisting of arrays of electrically isolated micron-size film capacitors embedded in a metal-dielectric-metal film sandwich. An exhaustive set of investigations is reported on the electron-lens assembly to be used in preparing and addressing such matrices. Progress on aqueous etching of alumina films with hot orthophosphoric acid and etching of molybdenum films with mixtures of O2 and HCl gases is described. Initial measurements are reported on bombardment-induced conductivity for the materials and film thicknesses considered. Author
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