Accession Number:

AD0483674

Title:

CALCULATION OF SURFACE BINDING ENERGIES BY COMPUTER SIMULATION OF THE SPUTTERING PROCESS.

Descriptive Note:

Master's thesis,

Corporate Author:

NAVAL POSTGRADUATE SCHOOL MONTEREY CALIF

Personal Author(s):

• Johnson,John Palmer ,III.

Report Date:

1966-05-01

Pagination or Media Count:

72.0

Abstract:

Sputtering of monocrystalline copper, a face-centered cubic, was investigated by computer simulation techniques using the Born-Mayer potential. Normally incident argon ions were shot into the 111, 110, and 100 orientation at various energies. Qualitatively correct deposit patterns were obtained for all orientations. Surface irregularities were found to play a significant role in the sputtering mechanism. Approximate values for the surface binding energy on the 111 and 110 orientations were 2.25 eV and 3.0 eV, respectively. Author

Descriptors:

• *ION BOMBARDMENT
• SIMULATION
• SURFACE PROPERTIES
• SPUTTERING
• METAL CRYSTALS
• COPPER
• N BODY PROBLEM
• ARGON
• ENERGY
• IONIZATION POTENTIALS
• ATOMIC ENERGY LEVELS
• DAMAGE
• RADIATION EFFECTS
• DIGITAL COMPUTERS

Subject Categories:

• Nuclear Physics and Elementary Particle Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE