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HIGH-INFORMATION-DENSITY STORAGE SURFACES.
Quarterly rept. no. 2, 1 Jul-30 Sep 65,
STANFORD RESEARCH INST MENLO PARK CA
Pagination or Media Count:
The report presents the results of experimental investigations of processes under development for the formation of high-density information storage mosaics, consisting of regular arrays of electrically isolated, micron-size film capacitors embedded in a metal-dielectric-metal film sandwich. The high-resolution field-emitter gun to be used for electron-sensitive resist exposure and subsequently for storage mosaic address has been assembled for the former operation in a standard high-vacuum bell-jar station it is undergoing tests and modifications to achieve the degree of alignment necessary for realizing the required resolution. Work on the fabrication of partial structures has led to a closer assessment of the tolerances in film thickness and deposition rates required for the formation of storage surfaces. Some changes in the deposition apparatus are indicated. Progress on aqueous and gaseous etching techniques for molybdenum and alumina is reported. No conclusion has yet been reached regarding the most suitable technique for storage mosaic formation. Author
APPROVED FOR PUBLIC RELEASE