Accession Number:

AD0453346

Title:

ALL-EVAPORATED AND MASKLESS FABRICATION TECHNIQUES FOR ACTIVE DEVICES.

Descriptive Note:

Interim development rept., no. 2, 29 Aug28 Nov 64.

Corporate Author:

CBS LABS STAMFORD CONN

Personal Author(s):

Report Date:

1964-12-09

Pagination or Media Count:

26.0

Abstract:

The silicon evaporation fixtures were completed and a single run of silicon evaporations was made. The deposited silicon films were evaluated by optical microscopy and by chemical etching. The films are onocrystalline, but contain defects. The origin of the defects is discussed. A CALCULATION OF THE EVAPORATION PARAMETERS IS GIVEN. The ion generator is 90 complete. Author

Subject Categories:

Distribution Statement:

APPROVED FOR PUBLIC RELEASE