INVESTIGATIONS OF FUNDAMENTAL LIMITATIONS DETERMINING THE ULTIMATE SIZE OF MICROSTRUCTURES.
Final rept., 1 June 61-31 Dec 63,
RCA LABS PRINCETON N J
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Investigations of the fundamental limitations of the ultimate minimum size of microelectronic circuits showed that a minimum size exists for solid-state devices that are part of such a microelectronic circuit. The evaluation of the minimum size was based on various physical failure mechanisms encountered during fabrication and use. The investigations included active semiconductor devices as well as passive components i.e., resistors, capacitors, and inductors. It was concluded that a minimum possible device size would be of the order of 1000 cubicmicrons, which is comparable to the smallest device made today. Redundancy, generally looked upon as a long-term solution to the reduction of failures in microcircuits, was studied separately and found to have relatively little influence when the minimum size is considered. Furthermore, one technique for analyzing small structures, i.e., the law of scaling, was examined with regard to semiconductor devices. Author