INVESTIGATION OF HIGH POWER GASEOUS ELECTRONICS
Quarterly progress rept. no. 3, 16 May-15 Aug 1963,
MICROWAVE ASSOCIATES INC BURLINGTON MA
Pagination or Media Count:
Clean-up and thermal recovery of inert gases at the interface between a high power microwave discharge and a quartz interface were further investigated. The ion flux to the discharge wall was measured and was found to remain constant during a given clean-up run. The ion flux only varied by a factor of 2 for the five inert gases studied. From the experimental results it is evident that residual impurity gases desorbed from the walls of the clean-up vacuum system significantly affect initial clean-up and recovery behavior.
- Physical Chemistry