HARMONIC GENERATION IN PLASMAS.
STANFORD UNIV CALIF MICROWAVE LAB
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The generation of harmonics due to the nonlinear properties of a microwave plasma discharge is investigated theoretically and experimentally. The nonlinear effects of collisons, spatial variations of rf electric field and plasma density, and sheaths are analyzed. With the objective of developing an efficient harmonic generator and understanding the basic discharge mechanisms, various experimental techniques and configurations are explored. In order to obtain the harmonic current due to a velocity-dependent collision frequency, the veclocity distribution function is expanded in terms of spatial and time harmonics. By means of successive partial integrations along with the appropriate approximations, the third harmonic current for low collision frequencies is obtained in a particularly convenient form. It is shown that the effects of collisions constitute and inefficient method of harmonic generation and cannot account for the observed harmonics. Author