Accession Number:

AD0420582

Title:

THIN FILM ACTIVE DEVICES.

Descriptive Note:

Quarterly rept. no. 4, 22 Mar-22 June 63,

Corporate Author:

PHILCO CORP BLUE BELL PA

Personal Author(s):

Report Date:

1963-07-22

Pagination or Media Count:

31.0

Abstract:

Experimental troubles encountered in developi5g the low energy electron beam experiment were eliminated. Controlled reactive evaporation of thin A12O3 films was achiev5d. Such films produced at low deposition rates are continuous down to very small thicknesses and show substantial departure 6rom bulk density. A study of such layers as blocking layers for MEA devices and as hot electron tu5nel emitters has begun. MEA triodes fabricated with reactively evaporated A12O3 layers to provide modulat6r isolation showed unusual aging effects. Immediately after fabrication, low gm values are observed these increase f6r several weekb and then stabiliie. The firbt radiation damage test of MEA devices shows no degradation of gain for these devices for a neutron dose of 7 x 10 to the 12th power net. Author

Subject Categories:

Distribution Statement:

APPROVED FOR PUBLIC RELEASE