PRODUCTION ENGINEERING MEASURE FOR GALLIUM ARSENIDE VARACTOR DIODE.
Quarterly progress rept. no. 4, 1 Mar-31 May 63,
SYLVANIA ELECTRIC PRODUCTS INC WOBURN MASS
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Studies to obtain the processes necessary for the high volume production of gallium arsenide varactor diodes are described in this report. These investigations include studies of mesa contacts, epitaxial material, packaging, ohmic contacts and etching procedures. The results of the fabrication of completely epitaxial diodes and diffused epitaxial diodes are dis cussed as well as controlable etching procedures for volume production. Author