DETERMINATION OF ELECTRON ENERGY DISTRIBUTION IN AN ARGON RF PLASMA
AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OH
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Electron energy distribution measurements were determined in an RF excited plasma and are feasible if the plasma is excited by a cylindrical coil fed push-pull from a balanced power source and if probe measurements are made along the axis of the coil. As far as is known, the measurements made during this investigation are the first energy measurements made in an RF plasma. The basic theory of plasma generation and general probe theory were reviewed Medicus spherical probe theory was used in making the determinations. Experimental equipment was designed and built and suggestions for improvement were made. The results indicated that in the argon RF plasma of this investigation, the energy distribution is markedly non-Maxwellian.
- Plasma Physics and Magnetohydrodynamics