Accession Number:

AD0419025

Title:

DETERMINATION OF ELECTRON ENERGY DISTRIBUTION IN AN ARGON RF PLASMA

Descriptive Note:

Master's thesis

Corporate Author:

AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OH

Personal Author(s):

Report Date:

1963-08-01

Pagination or Media Count:

92.0

Abstract:

Electron energy distribution measurements were determined in an RF excited plasma and are feasible if the plasma is excited by a cylindrical coil fed push-pull from a balanced power source and if probe measurements are made along the axis of the coil. As far as is known, the measurements made during this investigation are the first energy measurements made in an RF plasma. The basic theory of plasma generation and general probe theory were reviewed Medicus spherical probe theory was used in making the determinations. Experimental equipment was designed and built and suggestions for improvement were made. The results indicated that in the argon RF plasma of this investigation, the energy distribution is markedly non-Maxwellian.

Subject Categories:

  • Plasma Physics and Magnetohydrodynamics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE