Accession Number:

AD0412841

Title:

SEMICONDUCTOR THIN FILMS.

Descriptive Note:

Quarterly rept. no. 6, 1 Apr-30 June 63.

Corporate Author:

LEAR SIEGLER INC SANTA MONICA CALIF

Personal Author(s):

Report Date:

1963-01-01

Pagination or Media Count:

18.0

Abstract:

1 To Deposit Films in a Dynamic 10 to the -8th power Vacuum System 2 To Investigate Annealing of GaAs Films 3 To Make Hall Measurements at a Series of Temperatures 4 To Investigate Deposition at Microns per Second 5 To Improve the Resolution in Electron Microscope Surface Studies and to Investigate a Setup for Etching Thicker Films Down to Thicknesses Suitable for Electron Microscopy and 6 To Continue Device Studies with Films of Available Quality. Author

Descriptors:

• VACUUM
• X RAY DIFFRACTION

Subject Categories:

Distribution Statement:

APPROVED FOR PUBLIC RELEASE