Accession Number:

AD0412827

Title:

MATERIAL PROCESSING AND PHENOMENA INVESTIGATIONS FOR FUNCTIONAL ELECTRONIC BLOCKS.

Descriptive Note:

Interim engineering rept. no. 3, 6 Mar-6 June 63,

Corporate Author:

WESTINGHOUSE ELECTRIC CORP PITTSBURGH PA

Personal Author(s):

• Angello,S.J.

Report Date:

1963-01-01

Pagination or Media Count:

56.0

Abstract:

Full geometry control over anodic oxide growth on n-type silicon web has been achieved within the present accuracy of the opticacaace recombination velocity in silicon as a function of the impurities incorporated into an oxide film, and as a function of applied cell bias field-effect, has become fully operational. Doped anodic oxide films have been used as localized diffusion sources without masking the rest of the silicon surface with an undoped oxide layer. Many experimental passivated functional electronic blocks FEBs fabricated at Westing house have been examined in the scanning electron microscope. Also examined were several inte grated semiconductor devices purchased on the open market, and several specially fabricated devices. A method has been successfully developed and demonstrated for positioning the gate elec trodes on silicon field-effect devices utilizing a feedback signal derived from the workpiece. Author

Descriptors:

• (*MATERIALS
• PROCESSING)
• (*ELEC
• ANODES)
• (*ELECTRON BEAMS
• MANU)
• PHOSPHOROUS
• SILICON
• BORON
• OXIDES
• FILMS
• GEOMETRY
• ELECTRON
• SCANNING
• GATES (CIRCUITS)
• THICK
• PHOTOGRAPHS
• PRINTED CIRCUITS
• MODULES
• OPTICAL EQUIPMENT SEMICONDUCTOR

Subject Categories:

Distribution Statement:

APPROVED FOR PUBLIC RELEASE