Accession Number:

AD0270814

Title:

THE INFLUENCE OF COMPLEX ION FORMATION DURING DIFFUSION ON THE DISTRIBUTION OF IMPURITIES IN SILICON

Descriptive Note:

Corporate Author:

ELECTRON DEVICE LAB OHIO STATE UNIV RESEARCH FOUNDATION COLUMBUS

Personal Author(s):

Report Date:

1961-11-01

Pagination or Media Count:

1.0

Abstract:

Subject Categories:

Distribution Statement:

APPROVED FOR PUBLIC RELEASE