Accession Number:

AD0266558

Title:

SPUTTERING. A BIBLIOGRAPHY OF THEORY AND EXPERIMENTAL RESULTS

Descriptive Note:

Corporate Author:

LOCKHEED MISSILES AND SPACE CO SUNNYVALE CALIF

Personal Author(s):

Report Date:

1961-08-01

Pagination or Media Count:

1.0

Abstract:

Originally this search was made to collect information on the effects of sputtering on the surface properties of materials used in space vehicles. Since in this area the literature is limited, the search was expanded to include any reference related to sputtering. The types of sputtering included are cathode, ion, and particle. Sputtering as a means of depositing thin films of metals was not included. This bibliography reflects the holdings of the Technical Information Center, Lockheed Missiles Space Company. Author

Subject Categories:

Distribution Statement:

APPROVED FOR PUBLIC RELEASE