Accession Number:

AD0266358

Title:

ANODIC FORMATION OF TITANIUM OXIDE DIELECTRIC FILMS

Descriptive Note:

Corporate Author:

LOCKHEED MISSILES AND SPACE CO SUNNYVALE CALIF

Personal Author(s):

Report Date:

1961-09-01

Pagination or Media Count:

1.0

Abstract:

An instrument was designed to measure the capacitance and dielectric loss of an anodic film during its formation. Results obtained on Ti are discussed. The instrument was designed to control the automatic production of capacitors however, it has since become more useful as a tool in studying formation of anodic oxide films. The capacitance and loss of the oxide film are measured using the anode as one electrode and the electrolyte as the other. In this system, the capacity is inversely proportional to the dielectric film thickness. An indication of film quality is obtained at the same time by measuring loss tangent during the forming process. Author

Subject Categories:

Distribution Statement:

APPROVED FOR PUBLIC RELEASE