Accession Number : ADA625038


Title :   Thin Film Materials and Devices for Resistive Temperature Sensing Applications


Descriptive Note : Doctoral thesis


Corporate Author : PENNSYLVANIA STATE UNIV STATE COLLEGE


Personal Author(s) : Basantani, Hitesh


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a625038.pdf


Report Date : 21 May 2015


Pagination or Media Count : 163


Abstract : Thin films of vanadium oxide (VOx) and hydrogenated amorphous silicon (a-Si:H) are the two dominant material systems used in resistive infrared radiation detectors (microbolometers) for sensing long wave infrared (LWIR) wavelengths in the 8-14 micrometers range. Typical thin films of VOx (x less than 2) currently used in the bolometer industry have a magnitude of temperature coefficient of resistance (TCR) between 2%/K - 3%/K. In contrast, thin films of hydrogenated germanium (SiGe:H) have TCR between 3%/K to 4%/K. Devices made from either of these materials have resulted in similar device performance with NETD approximately equal to 25 mK. The performance of the microbolometers is limited by the electronic noise, especially 1/f noise. Therefore, regardless of the choice of bolometer sensing material and read out circuitry, manufacturers are constantly striving to reduce 1/f noise while simultaneously increasing TCR to give better signal to noise ratios in their bolometers and ultimately, better image quality with more thermal information to the end user.


Descriptors :   *BOLOMETERS , *ELECTRICAL RESISTANCE , *TEMPERATURE COEFFICIENT OF REACTIVITY , AMORPHOUS MATERIALS , CHEMICAL VAPOR DEPOSITION , CRYSTALLIZATION , DIRECT CURRENT , ELECTRICAL PROPERTIES , GERMANIUM COMPOUNDS , INFRARED DETECTION , ION BEAMS , LONG WAVELENGTHS , OXIDES , REACTIVITIES , SILICON DIOXIDE , THERMAL PROPERTIES , THESES , THIN FILMS , VANADIUM COMPOUNDS


Subject Categories : Physical Chemistry
      Test Facilities, Equipment and Methods
      Infrared Detection and Detectors
      Solid State Physics
      Thermodynamics


Distribution Statement : APPROVED FOR PUBLIC RELEASE