Accession Number : ADA624643


Title :   Non-Equilibrium Modeling of Inductively Coupled RF Plasmas


Descriptive Note : Conference paper


Corporate Author : AIR FORCE RESEARCH LAB EDWARDS AFB CA ROCKET PROPULSION DIV


Personal Author(s) : Munafo, Alessandro ; Cambier, Jean-Luc ; Panesi, Marco


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a624643.pdf


Report Date : Jan 2015


Pagination or Media Count : 12


Abstract : This paper discusses the modeling of non-equilibrium effects in inductively coupled plasma facilities. The model relies on the solution of the Navier-Stokes and Maxwell equations in a one-dimensional geometry. Steady-state solutions are obtained by means of an implicit Finite Volume method. Non-equilibrium effects are treated by means of a hybrid State-to-State formulation. The electronic states of atoms are treated as separate species, allowing for non-Boltzmann distributions of their populations. Thermal non-equilibrium between the translation and vibrational of heavy-particles is accounted for by means of a multi-temperature approach. The results show that non-equilibrium plays an important role close to the walls, due to the combined effects of Ohming heating, and chemical composition and temperature gradients.


Descriptors :   *PLASMAS(PHYSICS) , ATOMS , ELECTROMAGNETIC FIELDS , ELECTROMAGNETIC PROPERTIES , ELECTRONIC STATES , FLOW FIELDS , KINETICS , MAGNETOHYDRODYNAMICS , MAXWELLS EQUATIONS , MODELS , MOLECULES , NAVIER STOKES EQUATIONS , STEADY STATE , THERMODYNAMICS , TRANSPORT PROPERTIES


Subject Categories : Plasma Physics and Magnetohydrodynamics
      Thermodynamics


Distribution Statement : APPROVED FOR PUBLIC RELEASE