Accession Number : ADA623476


Title :   Microfabricated Cantilevers Based on Sputtered Thin-Film Ni50Ti50 Shape Memory Alloy (SMA)


Descriptive Note : Final rept. Nov 2014-May 2015


Corporate Author : ARMY RESEARCH LAB ADELPHI MD SENSORS AND ELECTRON DEVICES DIRECTORATE


Personal Author(s) : Knick, Cory R ; Morris, Christopher J


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a623476.pdf


Report Date : Aug 2015


Pagination or Media Count : 20


Abstract : In this work, we discuss the design and fabrication of a nickel-titanium (Ni50Ti50) shape memory alloy (SMA) cantilever array that was thermally actuated by harnessing the residual stress difference during the martensite-to-austenite phase transformation during heating. The cantilever devices were fabricated on a silicon (Si) wafer using standard microfabrication techniques and released using a xenon difluoride (XeF2) dry-etch technique and may therefore be applicable to microelectromechanical system (MEMS) switch or actuator applications. We demonstrated partially released devices capable of tearing a 1 3 m rib of Si upon thermal actuation.


Descriptors :   *SHAPE MEMORY ALLOYS , ACTUATION , ACTUATORS , ARRAYS , ETCHING , FABRICATION , METAL FILMS , MICROELECTROMECHANICAL SYSTEMS , PHASE TRANSFORMATIONS , RESIDUAL STRESS , SPUTTERING , THIN FILMS


Subject Categories : Physical Chemistry
      Properties of Metals and Alloys
      Fabrication Metallurgy


Distribution Statement : APPROVED FOR PUBLIC RELEASE