Accession Number : ADA621114


Title :   Phase and Texture Evolution in Chemically Derived PZT Thin Films on Pt Substrates


Descriptive Note : Journal article


Corporate Author : FLORIDA UNIV GAINESVILLE DEPT OF MATERIALS SCIENCE AND ENGINEERING


Personal Author(s) : Mhin, Sungwook ; Nittala, Krishna ; Lee, Jinhyung ; Robinson, Douglas S ; Ihlefeld, Jon F ; Brennecka, Geoff L ; Sanchez, Luz M ; Polcawich, Ronald G ; Jones, Jacob L


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a621114.pdf


Report Date : Sep 2014


Pagination or Media Count : 10


Abstract : The crystallization of lead zirconate titanate (PZT) thin films was evaluated on two different platinum coated Si substrates. One substrate consisted of a Pt coating on a Ti adhesion layer while the other consisted of a Pt coating on a TiO2 adhesion layer. The Pt deposited on TiO2 exhibited a higher degree of preferred orientation than the Pt deposited on Ti (as measured by the FWHM of the 111 peak about the sample normal). PZT thin films with a nominal Zr/Ti ratio of 52/48 were deposited on the substrates using the inverted mixing order (IMO) route. Phase and texture evolution of the thin films were monitored during crystallization using in situ X-ray diffraction at a synchrotron source. The intensity of the Pt3Pb phase indicated that deposition on a highly oriented Pt/TiO2 substrate resulted in less diffusion of Pb into the substrate relative to films deposited on Pt/Ti. There was also no evidence of the pyrochlore phase influencing texture evolution. The results suggest that PZT nucleates directly on Pt, which explains the observation of a more highly oriented 111 texture of PZT on the Pt/TiO2 substrate than on the Pt/Ti substrate.


Descriptors :   *CRYSTALLIZATION , *DIFFUSION COATINGS , *LEAD ZIRCONATE TITANATES , *THIN FILMS , CAPACITORS , COUPLING(INTERACTION) , DECOUPLING , DIFFUSION , EXPERIMENTAL DESIGN , FERROELECTRICITY , HEATING , IN SITU ANALYSIS , INTERFACES , MICROELECTROMECHANICAL SYSTEMS , PLATINUM , QUANTITATIVE ANALYSIS , SUBSTRATES , SYNCHROTRONS , TEXTURE , X RAY DIFFRACTION


Subject Categories : Physical Chemistry
      Coatings, Colorants and Finishes
      Crystallography
      Electricity and Magnetism
      Solid State Physics


Distribution Statement : APPROVED FOR PUBLIC RELEASE