Accession Number : ADA569247


Title :   A Widely-Accessible Distributed MEMS Processing Environment. The MEMS Exchange Program


Descriptive Note : Final technical rept. 30 Jun 2003-31 Jul 2012


Corporate Author : CORPORATION FOR NATIONAL RESEARCH INITIATIVES RESTON VA


Personal Author(s) : Huff, Michael A


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a569247.pdf


Report Date : 29 Oct 2012


Pagination or Media Count : 59


Abstract : Corporation for National Research Initiatives (CNRI) is submitting this Final Report for work performed on an award from the Defense Advanced Research Projects Agency (DARPA) under Grant Number MDA972-03-1-0022. This Grant award supported the program entitled, A Widely-Accessible Distributed MEMS Processing Environment, also known as the MEMS Exchange program, whereby CNRI established, operated, and advanced a distributed MEMS processing environment in which fabrication and testing of MEMS devices and systems is performed at multiple, geographically dispersed sites located around the country.


Descriptors :   *MICROELECTROMECHANICAL SYSTEMS , COMPUTER PROGRAMS , FABRICATION , NANOTECHNOLOGY


Subject Categories : Electrical and Electronic Equipment


Distribution Statement : APPROVED FOR PUBLIC RELEASE