Accession Number : ADA504079


Title :   Recent Progress in Silicon Mems Oscillators


Descriptive Note : Conference paper


Corporate Author : DISCERA INC ANN ARBOR MI


Personal Author(s) : Hsu, Wan-Thai


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a504079.pdf


Report Date : 01 Dec 2008


Pagination or Media Count : 13


Abstract : This paper first reviews key milestones in the making of silicon MEMS oscillators and how MEMS resonators can be used as frequency references for electronic systems, starting from silicon resonators device designs with different fabrication processes, to wafer level packaging technologies, to the robustness of volume manufacturing processes. Secondly, as final products, various MEMS oscillators from various companies are compared with quartz crystal oscillators in terms of jitter, power consumption, and temperature stability. Finally, to ensure the performance is good for real electronics applications, silicon MEMS oscillators not only have passed standard JEDEC reliability tests such as aging, solder reflow, thermal shock, and autoclave, but also have been demonstrated in several electronic systems.


Descriptors :   *RESONATORS , *OSCILLATORS , *SILICON , ELECTRONICS , SOURCES , METHODOLOGY , STABILITY , VIBRATION , INTEGRATED SYSTEMS , SYMPOSIA , MANUFACTURING , INTERFACES , ELECTRONIC EQUIPMENT , ACCURACY , FABRICATION , THERMAL STABILITY , CRYSTALS , RESONANT FREQUENCY , RELIABILITY , QUARTZ , MILITARY APPLICATIONS , PACKAGING , HUMAN BODY , FLOW , CIRCUITS , HEART RATE , BATCH PROCESSING , ENERGY CONSUMPTION , MECHANICAL COMPONENTS , THERMAL SHOCK , SOLDERING , JITTER , LOW POWER , CRYSTAL OSCILLATORS , TEST AND EVALUATION , FREQUENCY


Subject Categories : Electrical and Electronic Equipment


Distribution Statement : APPROVED FOR PUBLIC RELEASE