Accession Number : ADA490263


Title :   Processing Method for Creating Ultra-Thin Lead Zirconate Titanate (PZT) Films Via Chemical Solution Deposition


Descriptive Note : Final rept. Oct 2007-Jan 2008


Corporate Author : ARMY RESEARCH LAB ADELPHI MD SENSORS AND ELECTRON DEVICES DIRECTORATE


Personal Author(s) : Piekarz, Richard ; Polcawich, Ronald G


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a490263.pdf


Report Date : Dec 2008


Pagination or Media Count : 18


Abstract : This report summarizes the effort to use modifications to a lead zirconate titanate (PZT) chemical solution process to create high performance ferroelectric, dielectric, and piezoelectric thin films with reduced film thicknesses.


Descriptors :   *LEAD ZIRCONATE TITANATES , *THIN FILMS , PIEZOELECTRIC MATERIALS , COMPLEMENTARY METAL OXIDE SEMICONDUCTORS , SOLUTIONS(GENERAL) , DEPOSITION , CHEMICAL REACTIONS


Subject Categories : Inorganic Chemistry
      Electrical and Electronic Equipment


Distribution Statement : APPROVED FOR PUBLIC RELEASE