Accession Number : ADA472302


Title :   Hybrid Micro-Electro-Mechanical Tunable Filter


Descriptive Note : Doctoral thesis


Corporate Author : AIR FORCE INST OF TECH WRIGHT-PATTERSON AFB OH SCHOOL OF ENGINEERING


Personal Author(s) : Ochoa, Edward M


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a472302.pdf


Report Date : Sep 2007


Pagination or Media Count : 202


Abstract : While advantages such as good thermal stability and processing-chemical compatibilities exist for common monolithic-integrated micro-electro-mechanically tunable filters (MEM-TF) and MEM-tunable vertical cavity surface emitting lasers (MT-VCSEL), they often require full processing to determine device characteristics. Alternatively, the MEM actuators and the optical parts may be fabricated separately, then subsequently bonded. This hybrid approach potentially increases design flexibility. Since hybrid techniques allow integration of heterogeneous material systems, best of breed compound optoelectronic devices may be customized to enable materials groups to be optimized for tasks they are best suited. Thus, as a first step toward a hybrid (AlGaAs-polySi) MT-VCSEL, this dissertation reports the design, fabrication, and demonstration of an electrostatically actuated hybrid MEM-TF. A 250x250-um2, 4.92-um-thick, AlGaAs-GaAs distributed Bragg reflector was successfully flip-bonded to a polySi piston electrostatic actuator using SU-8 photoresist as bonding adhesive. The device demonstrated 53nm (936.5 - 989.5nm) of resonant wavelength tuning over the actuation voltage range of 0 to 10 V.


Descriptors :   *FABRICATION , *HYBRID SYSTEMS , *MICROELECTROMECHANICAL SYSTEMS , TUNABLE LASERS , ELECTROOPTICS , DEMONSTRATIONS , ACTUATORS , ELECTROSTATICS , ACTUATION , THERMAL STABILITY , VOLTAGE , EXPERIMENTAL DESIGN , THESES


Subject Categories : Electrical and Electronic Equipment
      Electrooptical and Optoelectronic Devices
      Radiofrequency Wave Propagation


Distribution Statement : APPROVED FOR PUBLIC RELEASE