Accession Number : ADA470986


Title :   Fabrication of Highly Ordered Anodic Aluminium Oxide Templates on Silicon Substrates


Descriptive Note : Journal article


Corporate Author : BROWN UNIV PROVIDENCE RI DIV OF ENGINEERING


Personal Author(s) : Yin, A ; Tzolov, M ; Cardimona, D ; Guo, L ; Xu, J


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a470986.pdf


Report Date : Jan 2007


Pagination or Media Count : 6


Abstract : The controlled fabrication of highly ordered anodic aluminium oxide (AAO) templates of unprecedented pore uniformity directly on Si, enabled by new advances on two fronts -- direct and timed anodisation of a high-purity Al film of unprecedented thickness (50 micrometres) on Si, and anodizing a thin but pre-textured Al film on Si, has been reported. To deposit high-quality and ultra-thick Al on a non-compliant substrate, a prerequisite for obtaining highly ordered pore arrays on Si by self-organisation while retaining a good adhesion, a specially designed process of e-beam evaporation followed by in situ annealing has been deployed. To obtain an AAO template with the same high degree of ordering and uniformity but from a thin Al film, which is not achievable by the self-organisation alone, pre-patterning of the thin Al surface by reactive ion etching using a free-standing AAO mask that was formed in a separate process was performed. The resultant AAO/Si template provides a good platform for integrated growth of nanotube, nanowire or nanodot arrays on Si. Template-assisted growth of carbon nanotubes (CNTs) directly on Si was demonstrated via a chemical vapour deposition method. By controllably removing the AAO barrier layer at the bottom of the pores and partially etching back the AAO top surface, new CNT/Si structures were obtained with potential applications in field emitter, sensors, oscillators and photodetectors.


Descriptors :   *ALUMINUM COMPOUNDS , *METAL FILMS , *SILICON , *CARBON NANOTUBES , *EVAPORATION , REPRINTS , REACTIVE ION ETCHING , CHEMICAL VAPOR DEPOSITION , OXIDES , FABRICATION , ADHESION


Subject Categories : Electrical and Electronic Equipment
      Refractory Fibers
      Metallurgy and Metallography
      Inorganic Chemistry


Distribution Statement : APPROVED FOR PUBLIC RELEASE