Accession Number : ADA467674


Title :   Microsystems Research in Japan


Descriptive Note : Final rept.


Corporate Author : LOYOLA COLL BALTIMORE MD INTERNATIONAL TECHNOLOGY RESEARCH INST


Personal Author(s) : Howe, Roger T ; Allen, Mark G ; Berlin, Andrew A ; Hui, Elliot E ; Monk, David J ; Najafi, Khalil ; Yamakawa, Mineo


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a467674.pdf


Report Date : Sep 2003


Pagination or Media Count : 195


Abstract : This report reviews Japan's research and development activities and strategies in the field of microsystems and microelectromechanical systems (MEMS). Topics covered include the future outlook of national initiatives, interactions between industry and universities, technology and manufacturing infrastructure, and emerging applications research. The panel's findings include the following: non-silicon microsystem technologies, together with parallel assembly technologies for low-cost mass manufacturing, merit increased attention. Incorporating non-silicon technologies into the MEMS Exchange should be considered, in order to identify, support, and standardize U.S. capabilities. Opportunities should be identified for exploiting early applications of synthetic nanostructures in microsystems. Metrology, process control, and device standardization should be pursued, in collaboration with Asia and Europe. Additional findings are outlined in the panel's executive summary.


Descriptors :   *JAPAN , *MICROELECTROMECHANICAL SYSTEMS , FABRICATION , INDUSTRIAL RESEARCH , SCIENTIFIC RESEARCH , RESEARCH MANAGEMENT , NANOTECHNOLOGY


Subject Categories : Industrial Chemistry and Chemical Processing
      Electrical and Electronic Equipment
      Atomic and Molecular Physics and Spectroscopy
      Mfg & Industrial Eng & Control of Product Sys


Distribution Statement : APPROVED FOR PUBLIC RELEASE