Accession Number : ADA419850


Title :   Micromachined Precision Inertial Instruments


Descriptive Note : Final rept. Jun 1998-Jul 2003


Corporate Author : MICHIGAN UNIV ANN ARBOR


Personal Author(s) : Najafi, Khalil


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a419850.pdf


Report Date : Nov 2003


Pagination or Media Count : 106


Abstract : This program focuses on developing inertial-grade micromachined accelerometers and gyroscopes and their associated electronics and packaging for use in a variety of military and commercial applications. During the project timeline in-plane, out-of-plane and monolithic 3-axis accelerometers have been developed with their interface electronics. Analysis, simulation, fabrication, and testing techniques for these accelerometer systems have been developed.


Descriptors :   *ACCELEROMETERS , *MILITARY APPLICATIONS , *GYROSCOPES , *MICROELECTROMECHANICAL SYSTEMS , OUTPUT , CONTROL , SIMULATION , ELECTRONICS , INTERFACES , STRUCTURAL PROPERTIES , RESOLUTION , SINGLE CRYSTALS , SUBSTRATES , SENSITIVITY , QUALITY , SILICON , PACKAGING , PARASITES , LOOPS , READ OUT TECHNIQUES , ASPECT RATIO , CLOSED LOOP SYSTEMS , POLYSILICONS


Subject Categories : Test Facilities, Equipment and Methods
      Navigation and Guidance


Distribution Statement : APPROVED FOR PUBLIC RELEASE