Accession Number : ADA284838


Title :   Growth and Doping of Al(x)Ga(1-x)N Films by Electron Cyclotron Resonance Assisted Molecular Beam


Descriptive Note : Final rept. 1 May 1992-30 Apr 1994


Corporate Author : BOSTON UNIV MA DEPT OF ELECTRICAL COMPUTER AND SYSTEMS ENGINEERING


Personal Author(s) : Moustakas, Theodore D


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a284838.pdf


Report Date : 31 Aug 1994


Pagination or Media Count : 128


Abstract : The work focused on the heteroepitaxial growth, doping and structural and optoelectronic characterization of GaN and AlN films by the method of ECR- assisted MBE. The effect of charged species in the ECR discharge in the growth and properties of the films was investigated. Conditions were identified to grow atomically smooth films (layer-by-layer growth) in semi-insulating form (p = 10(exp 12) ohms x cm). Such films were doped p- and n-type with Mg and Si respectively at the level of 10(exp 19)/cu cm. Reactive ion etching and metallic contacts to GaN were developed. From these studies we concluded that surface states are not present in the gap of GaN and thus dislocation should not effect the device performance. The role of hydrogen in the doping of GaN was investigated and p-n junction LED is were fabricated and tested. The defects in these materials were investigated by transport, photoluminescence and optical studies.


Descriptors :   *ALUMINUM GALLIUM ARSENIDES , *FILMS , *EPITAXIAL GROWTH , *MOLECULAR BEAMS , *ELECTRONS , *CYCLOTRON RESONANCE , *DOPING , *SEMICONDUCTORS , IONS , ETCHING , HYDROGEN , BLUE(COLOR) , JUNCTIONS , GALLIUM , TRANSPORT , RESONANCE , SILICON , ALUMINUM , DISLOCATIONS , DEFECTS(MATERIALS) , METAL CONTACTS , SPIN STATES , LIGHT EMITTING DIODES , SURFACES , NITRIDES , ELECTRON SPIN RESONANCE , MAGNESIUM , PHOTOLUMINESCENCE , LAYERS , MATERIALS


Subject Categories : Inorganic Chemistry
      Electrical and Electronic Equipment
      Crystallography
      Particle Accelerators


Distribution Statement : APPROVED FOR PUBLIC RELEASE