Accession Number : ADA268254


Title :   Precise Flux Control for Lattice Matched Superlattice Materials


Descriptive Note : Final rept. 1 May-30 Nov 92,


Corporate Author : SUPERIOR VACUUM TECHNOLOGY INC EDEN PRAIRIE MN


Personal Author(s) : Chow, Peter P


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a268254.pdf


Report Date : Feb 1993


Pagination or Media Count : 19


Abstract : We have investigated flux transients in Molecular Beam Epitaxy (MBE) sources. A detailed study of the relevant factors has been carried out. For the first time Ga transient was measured in the presence of as in a realistic growth environment. Growth rate variation due to transients can be accurately monitored by RHEED analysis. We demonstrated that transients could be minimized or even eliminated by source temperature ramping and mass spectrometer feedback control.


Descriptors :   *CONTROL , *MATERIALS , *FLUX(RATE) , *CRYSTAL LATTICES , *EPITAXIAL GROWTH , *SUPERLATTICES , *MOLECULAR BEAMS , TRANSIENTS , OSCILLATION , ARSENIC , MATCHING , ELECTRON DIFFRACTION , MASS SPECTROMETERS , SEMICONDUCTORS , HIGH ENERGY , FEEDBACK , GALLIUM , REFLECTION , TEMPERATURE


Subject Categories : Electrical and Electronic Equipment
      Crystallography
      Fluid Mechanics
      Atomic and Molecular Physics and Spectroscopy


Distribution Statement : APPROVED FOR PUBLIC RELEASE