Accession Number : ADA267905


Title :   Soft X-Ray Emission from Alexandrite Laser-Matter-Interaction


Corporate Author : NAVAL RESEARCH LAB WASHINGTON DC


Personal Author(s) : Burkhalter, P G ; Harter, D J ; Gabl, E F ; Bado, P ; Newman, D A


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a267905.pdf


Report Date : 15 Jul 1993


Pagination or Media Count : 29


Abstract : X-ray spectroscopy was used to quantify the plasma generated by a focused, Alexandrite laser as a potential alternative source in proximity lithography. An x-ray emission efficiency of 2 - 11% was determined by analysis of spectral data (10 - 14A) from transition-metal targets.... X-ray spectroscopy, Proximity, Lithography


Descriptors :   *LITHOGRAPHY , EMISSION , TRANSITION METALS , EFFICIENCY , X RAY SPECTROSCOPY , TARGETS , LASERS


Subject Categories : Lasers and Masers
      Printing and Graphic Arts


Distribution Statement : APPROVED FOR PUBLIC RELEASE