Accession Number : ADA266759


Title :   Single Crystal Diamond Films


Descriptive Note : Final rept. 1 Aug 1992-1 Mar 1993


Corporate Author : IMPLANT SCIENCES CORP WAKEFIELD MA


Personal Author(s) : Bunker, Stephen N ; Sahagian, Richard


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a266759.pdf


Report Date : 28 May 1993


Pagination or Media Count : 27


Abstract : Diamond films are important for radiation tolerant devices. However, fabrication of single crystal films has proven to be much more difficult than polycrystalline deposits. A novel deposition process is proposed which can be used to deposit diamond on a seed crystal. The technique permits patterned deposits in islands and offers the potential of a new method for attempting to dope diamond semiconductors.... Single crystal, Diamond, Thin films, Radiation tolerant


Descriptors :   *FILMS , *DIAMONDS , *SINGLE CRYSTALS , *RADIATION TOLERANCE , THIN FILMS , FABRICATION , CRYSTALS , SEMICONDUCTORS , DEPOSITION , DOPING , ISLANDS , POLYCRYSTALLINE , SEEDS


Subject Categories : Radiobiology
      Electrical and Electronic Equipment
      Crystallography
      Solid State Physics


Distribution Statement : APPROVED FOR PUBLIC RELEASE