Accession Number : ADA266667


Title :   High Temperature Reliability of Refractory Metal Ohmic Contacts to Diamond


Descriptive Note : Professional paper,


Corporate Author : NAVAL COMMAND CONTROL AND OCEAN SURVEILLANCE CENTER RDT AND E DIV SAN DIEGO CA


Personal Author(s) : Roser, M ; Hewett, C A


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a266667.pdf


Report Date : Jul 1992


Pagination or Media Count : 7


Abstract : Several metallization schemes using refractory metals have been demonstrated to produce ohmic contacts to diamond via a solid-state reaction process. This process utilizes existing microelectronic techniques and provides strongly adherent contacts which exhibit low contact resistance. Measurements of the long-term reliability of Mo/Au contacts formed by this process on a type IIb diamond crystal are presented here for the temperature range 450 to 625 deg C. The measurements consist of the resistance between two contacts as a function of isothermal annealing time over time intervals in excess of 130 h in a purified inert ambient. The Mo/Au contacts appeared to be stable and reliable at these high temperatures with no indications of deterioration or degradation of performance.


Descriptors :   *HIGH TEMPERATURE , *DIAMONDS , *RELIABILITY , *REFRACTORY METALS , FUNCTIONS , ELECTRONICS , METALS , TIME INTERVALS , REPRINTS , MOLYBDENUM , SEMICONDUCTORS , METALLIZING , SOLID STATE CHEMISTRY , DETERIORATION , GOLD , MICROELECTRONICS , SOLIDS , CRYSTALS , ELECTROCHEMISTRY , RESISTANCE , MEASUREMENT , TEMPERATURE , ANNEALING , DEGRADATION


Subject Categories : Physical Chemistry
      Electromagnetic Shielding
      Ceramics, Refractories and Glass
      Electricity and Magnetism


Distribution Statement : APPROVED FOR PUBLIC RELEASE