Accession Number : ADA265685


Title :   Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals, and Devices


Corporate Author : MICROELECTRONICS CENTER OF NORTH CAROLINA RESEARCH TRIANGLE PARK


Personal Author(s) : Auciello, Orlando


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a265685.pdf


Report Date : 21 Mar 1993


Pagination or Media Count : 6


Abstract : The main objective of the Institute was to bring together scientists from different fields of research such as semiconductor, oxide, and metallic materials, as well as those working on the development of systems for thin film processing and characterization. The highly interdisciplinary nature of the Institute allowed participant scientists to interchange ideas in an environment rarely available in other international conferences. This has opened a window of opportunities for collaborations in research and development, which more and more will require interdisciplinary exchange of ideas.


Descriptors :   *THIN FILMS , SYMPOSIA , SEMICONDUCTORS , DEPOSITION , PROCESSING


Subject Categories : Electrical and Electronic Equipment
      Solid State Physics


Distribution Statement : APPROVED FOR PUBLIC RELEASE