Accession Number : ADA265150


Title :   Ellipsometry Studies of Semiconductors Surface Cleaning


Descriptive Note : Technical rept.


Corporate Author : NORTH CAROLINA UNIV AT CHAPEL HILL DEPT OF CHEMISTRY


Personal Author(s) : Irene, E A ; Hu, Y Z


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a265150.pdf


Report Date : 04 May 1993


Pagination or Media Count : 8


Abstract : Ellipsometry is shown to provide a sensitive evaluation of the surface cleaning process based on in-situ and ex-situ studies of the cleaning of Si, Ge, and InP surfaces. Both single wavelengths and spectroscopic ellipsometry are shown to be applicable. The essential of the measurement and sample results are discussed. Ellipsometry, Surface cleaning


Descriptors :   *SEMICONDUCTORS , *ELLIPSOMETERS , *CHEMICAL CLEANING , SURFACES , CLEANING , INDIUM PHOSPHIDES , SILICON , BERYLLIUM


Subject Categories : Electrical and Electronic Equipment
      Optics


Distribution Statement : APPROVED FOR PUBLIC RELEASE