Accession Number : ADA263402


Title :   Materials and Manufacturing Processing; Special Issue on Hard Carbon Films


Corporate Author : MATERIALS MODIFICATION INC FAIRFAX VA


Personal Author(s) : Sudarshan, T S ; Srivatsan, T S


Full Text : https://apps.dtic.mil/dtic/tr/fulltext/u2/a263402.pdf


Report Date : Jan 1993


Pagination or Media Count : 135


Abstract : Laser processing of polycrystalline diamond and amorphous carbon films is shown to be a promising technology for micropatterning of these materials in electronics and other applications. By using excimer lasers, holes and pits have been formed in 10-60 micrometers thick diamond films by physical etching with ablation rates of up to 300 nm/pulse. The channels of micrometer scale width were created in diamond-like carbon films on silicon by chemical etching in oxygen by the scanning with a cw Ar+ laser beam. At laser powers below the etching threshold, a transformation of amorphous carbon to graphitic carbon allows the formation of conductive lines of different geometry in dielectric carbon layers.


Descriptors :   *PROCESSING , *FILMS , *DIAMONDS , *LASERS , SCANNING , ELECTRONICS , ABLATION , IONS , OPTICAL PROPERTIES , COMPOSITE MATERIALS , RATES , SILICON , SCALE , PULSES , COATINGS , OXYGEN , ETCHING , LASER BEAMS , CARBON , GRAPHITE , MICROMETERS , POLYCRYSTALLINE , CONTINUOUS WAVE LASERS , TRANSFORMATIONS , CHANNELS , XENON , EXCIMERS , ARGON LASERS , WIDTH , GEOMETRY , CHLORIDES , MICROELECTRONICS , DIELECTRICS , NEW YORK , MANUFACTURING , CONDUCTIVITY , CHEMICALS , LAYERS , MATERIALS


Subject Categories : Physical Chemistry
      Lasers and Masers
      Coatings, Colorants and Finishes
      Crystallography


Distribution Statement : APPROVED FOR PUBLIC RELEASE